This instrument enables extremely precise analysis of film thickness and optical constants by measuring absolute spectral reflectance of microscopic regions. Non-destructive and non-contact thickness measurement can be carried out on multilayered films and various coating layers including films, wafers, and optical materials. Measurement speed is as fast as 1 second / point. Software is easy to use even for beginner users analyzing optical constants.
All functions necessary for film thickness measurements are integrated in the head
Highly accurate absolute reflectance measurement using microspectroscopy (thickness of multilayered film and optical constants)
High speed measurement of less than 1 second per point
An optical system which makes possible measurement with a wide wavelength range (UV to NIR) using microscopy
Safety mechanism with area sensors
Easy Analysis Wizard which allows anyone- even untrained operators, to carry out the analysis of optical constants without difficulty
Software program includes macro functions for customization of the measurement sequence
Various customizations are possible
Complex optical constants can also be analyzed
(multi-point analysis)
300 mm stage available
Absolute reflectance measurement
Thickness analysis
Optical constant analysis (n: refractive index k: extinction coefficient)
All functions necessary for film thickness measurements are integrated in the head
Highly accurate absolute reflectance measurement using microspectroscopy (thickness of multilayered film and optical constants)
High speed measurement of less than 1 second per point
An optical system which makes possible measurement with a wide wavelength range (UV to NIR) using microscopy
Safety mechanism with area sensors
Easy Analysis Wizard which allows anyone- even untrained operators, to carry out the analysis of optical constants without difficulty
Software program includes macro functions for customization of the measurement sequence
Various customizations are possible
Complex optical constants can also be analyzed
(multi-point analysis)
300 mm stage available
Absolute reflectance measurement
Thickness analysis
Optical constant analysis (n: refractive index k: extinction coefficient)
| Type | OPTM-A1 | OPTM-A2 | OPTM-A3 |
| Wavelength Range | 230 nm～800 nm | 360 nm～1100 nm | 900 nm～1600 nm |
| Film Thickness Measurement Range* | 1 nm～35 μm | 7 nm～49 μm | 16 nm～92 μm |
| Sample Size** | Max.200 mm×200 mm×17 mm | ||
| Spot Size | Φ５、Φ10、Φ20、Φ40 | ||
Notes:
For Automatic XY stage type
*Values are SiO2 equivalent thickness.
**Please contact us for consultation concerning the 300 mm stage.
| Type | Automatic XY stage type | Fixed frame type | Built-in head type |
| Size (W×D×H) | 556×566×618 mm | 368×468×491 mm | 210×441×474 mm 90×250×190 mm* |
| Weight | 66 kg | 38 kg | 23 kg 4 kg* |
| Maximum power consumption** | 500 VA | 400 VA | |
*Power supply unit
**Select voltage at purchase （AC 90 -110 V or 200-240 V）
